Abstract
We have used stoichiometric Y1Ba2Cu3O7−x powder as magnetron sputtering target to deposit high-quality high-T c superconducting thin films on MgO, SrTiO3, and ZrO2 substrates. The zero-resistance temperatures are 86–88 K, and the 77 K zero-field critical current density is 8 × 105 A/cm2. The films are highlyc-axis oriented. Films deposited on 10 × 10 × 1 mm3 ZrO2 substrates have surface resistances below 25 mΩ at 77 K and 94 GHz. Using powder targets instead of bulk targets has the following advantages: simple and low-cost target preparation, simple target replacement, and versatility for large-area deposition.
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Luo, W.G., Ding, A.L., Chan, K.S. et al. In-situ deposition of superconducting YBCO thin films by magnetron sputtering from powder target. J Supercond 5, 239–244 (1992). https://doi.org/10.1007/BF00617623
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DOI: https://doi.org/10.1007/BF00617623