Abstract
Polycrystalline Ni has been grown by decomposition of Ni(CO)4 using different wavelengths of the visible radiation of a Kr+ laser. The influence of laser irradiance, substrate material and scanning velocity on deposition rate and widths of patterns has been investigated. The deposition rates achieved are typically several μm/s, and the lateral dimensions of the deposits can be as small as 1 μm.
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References
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