Applied Physics A

, Volume 28, Issue 2, pp 99–102 | Cite as

Supersaturated Si-As alloy formation by ion implantation and pulsed electron beam annealing

  • A. Turos
  • O. Meyer
  • J. Geerk
Contributed Papers


Supersaturated surface alloys produced by very high dose (0.8−2.6×1017cm−2) implantation of As-ions into silicon and subsequent pulsed electron-beam annealing have been investigated by means of the channeling technique. The maximum solubility limit of 7×1021 As/cm3 has been determined. It exceeds the equilibrium solubility limit by more than a factor of 4. Angular scan measurements indicated that for doses above 1×1017cm−2 As atoms are displaced by about 0.12 Å from the regular lattice sites.


61.70 81.40 


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    C.W. White, P.P. Pronko, S.R. Wilson, B.R. Appleton, J. Narayan, R.T. Young: J. Appl. Phys.50, 3261 (1979)Google Scholar
  2. 2.
    C.W. White, S.R. Wilson, B.R. Appleton, F.W. Young: J. Appl. Phys.51, 738 (1980)Google Scholar
  3. 3.
    J. Geerk, F. Ratzel: KfK-Report 2912 (1980)Google Scholar
  4. 4.
    A. Turos, J. Geerk: Appl. Phys.22, 385 (1980)Google Scholar
  5. 5.
    W.K. Chu, J.W. Mayer, M.-A. Nicolet:Backscattering Spectrometry (Academic Press, New York 1978)Google Scholar
  6. 6.
    J.F. Gibbons, W.S. Johnson, S.W. Mylroie:Projected Range Statistics (Halstead Press 1975)Google Scholar
  7. 7.
    H. Kodera: Jap. J. Appl. Phys.2, 212 (1963)Google Scholar
  8. 8.
    J.H. Barrett: Phys. Rev.B3, 1527 (1971)Google Scholar
  9. 9.
    C.W. White, B.R. Appleton, B. Stritzker, D.M. Zehner, S.R. Wilson: InLaser and Electron-Beam Solid Interactions and Material Processing, ed. by J.F. Gibbons et al. (Elsevier, North-Holland, Amsterdam 1981)Google Scholar
  10. 10.
    W.K. Chu, S.R. Mader, E. Rimini: InLaser and Electron Beam Processing of Materials, ed. by C.W. White and P.S. Peercy (Academic Press, New York 1980)Google Scholar

Copyright information

© Springer-Verlag 1982

Authors and Affiliations

  • A. Turos
    • 1
  • O. Meyer
    • 1
  • J. Geerk
    • 1
  1. 1.Kernforschungszentrum KarlsruheInstitut für Angewandte Kernphysik IKarlsruhe 1Fed. Rep. Germany

Personalised recommendations