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Applied Physics A

, Volume 36, Issue 1, pp 37–42 | Cite as

A simple formula for low-energy sputtering yields

  • Ch. Steinbrüchel
Contributed Papers

Abstract

A simple formula for low-energy sputtering yields of elemental targets is presented. The formula follows directly from Sigmund's theory but includes a modified form of the functionα(M t /M p ) and an accurate expression for the nuclear stopping cross section. Good agreement with experimental results is obtained for the projectiles Ne, Ar, Kr sputtering not too reactive surfaces at energies ≲1 keV. Further experiments are suggested as well as theoretical work concerning the meaning of the surface binding energy and the effect of the surface on the sputtering process in general.

PACS

79.20 

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Copyright information

© Springer-Verlag 1985

Authors and Affiliations

  • Ch. Steinbrüchel
    • 1
  1. 1.Laboratories RCA Ltd.ZürichSwitzerland

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