Applied Physics A

, Volume 36, Issue 1, pp 27–30 | Cite as

Spectroscopic studies of ArF laser photoablation of PMMA

  • G. M. Davis
  • M. C. Gower
  • C. Fotakis
  • T. Efthimiopoulos
  • P. Argyrakis
Contributed Papers

Abstract

A Spectroscopic study has been made of the emission spectra arising from ArF laser initiated photoablation of PMMA samples. This process leads to direct etching of the polymer. The thermal temperature of the CH fragment species in the plume immediately above the ablated site was found to be ∼ 3200 ±200 K. The translational velocity of this species was found to be ∼4.2×105 cm/s corresponding to a translational temperature of ∼ 11,000 K. These results are consistent with a rapid direct bond scission model for ablation.

PACS

82.50 33 

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Copyright information

© Springer-Verlag 1985

Authors and Affiliations

  • G. M. Davis
    • 1
  • M. C. Gower
    • 2
  • C. Fotakis
    • 3
  • T. Efthimiopoulos
    • 3
  • P. Argyrakis
    • 3
  1. 1.Clarendon LaboratoryOxford UniversityOxfordEngland
  2. 2.Laser Division SERC Rutherford Appleton LaboratoryChilton DidcotEngland
  3. 3.Research Centre of Crete and Department of PhysicsUniversity of CreteHeraklionGreece

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