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The influence of substrate geometry on the emission properties of a liquid metal ion source

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Abstract

The effect of needle radius, cone angle and shaft diameter on the threshold voltage and angular intensity — total current relationships for a Ga liquid-metal ion source (LMIS) was investigated. The variation of threshold voltage with needle geometry could be described in terms of the Taylor theory of liquid cone formation by electrostatic fields. The beam energy spread was mainly a function of total source current and was not a sensitive function of emitter geometry. Source angular intensity at a constant total current increased linearly with threshold voltage when the latter was altered due to source geometry.

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Authors and Affiliations

  1. Department of Applied Physics and Electrical Engineering, Oregon Graduate Center, 19600 N. W. Von Neumann Drive, 97006-1999, Beaverton, Or, USA

    A. E. Bell & L. W. Swanson

Authors
  1. A. E. Bell
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  2. L. W. Swanson
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Bell, A.E., Swanson, L.W. The influence of substrate geometry on the emission properties of a liquid metal ion source. Appl. Phys. A 41, 335–346 (1986). https://doi.org/10.1007/BF00616057

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  • DOI: https://doi.org/10.1007/BF00616057

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