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Plasma Chemistry and Plasma Processing

, Volume 5, Issue 3, pp 255–261 | Cite as

Electron density measurements of argon surface-wave discharges

  • M. Brake
  • J. Rogers
  • M. Peters
  • J. Asmussen
  • R. Kerber
Article

Abstract

The electron density of microwave-generated surface-wave discharges in argon have been measured using Stark broadening and calculated from the measured wavelengths of the standing surface wave. Results obtained from these two techniques compare well. The electron density varies from 1013 to 1014/cm3 for pressures ranging from 50 to 800 torr.

Key words

Microwave plasma surface-wave discharge Stark broadening argon plasma 

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Copyright information

© Plenum Publishing Corporation 1985

Authors and Affiliations

  • M. Brake
    • 1
  • J. Rogers
    • 1
  • M. Peters
    • 1
  • J. Asmussen
    • 1
  • R. Kerber
    • 1
  1. 1.College of EngineeringMichigan State UniversityEast Lansing

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