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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 19, No. 3, pp. 520–523, September, 1973.
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Prokhorov, Y.I., Sologub, V.A. & Sukhodaev, B.A. The infrared transmission and reflectance spectra of silicon nitride films obtained in a high-frequency discharge plasma. J Appl Spectrosc 19, 1211–1213 (1973). https://doi.org/10.1007/BF00614591
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DOI: https://doi.org/10.1007/BF00614591