Skip to main content
SpringerLink
Log in

Selecting the optimum recording conditions of ATR spectra for the determination of the optical constants of thin (d<10 nm) oxide films

  • Published:
Journal of Applied Spectroscopy Aims and scope

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Literature cited

  1. N. Kharrik, Spectroscopy of Internal Reflection [in Russian], Mir, Moscow (1970).

    Google Scholar 

  2. A. V. Rakov, Spectrophotometry of Semiconducting Thin-Film Structures, Sovetskoe Radio [in Russian], Moscow (1975).

  3. V. N. Drozdov, T. I. Kovalevskaya, and K. K. Svitashev, Mikroelektronika,2, No. 1, 46 (1973).

    Google Scholar 

  4. V. M. Zolotarev, V. A. Veremei, and T. A. Gorbunova, Opt. Spektrosk., 31, No. 1, 77 (1971).

    Google Scholar 

  5. V. M. Zolotarev, Zh. Prikl. Spektrosk.,5, No. 1, 62 (1966).

    Google Scholar 

  6. V. M. Zolotarev, Opt. Spektrosk.,29, No. 1, 66 (1970).

    Google Scholar 

  7. J. Fahrenfort, Molec. Spectrosc. Proc. Conf. Brington, 111 (1968).

  8. A. C. Gilby, J. Burr, and W. Krueger, J. Phys. Chem.,70, 1525 (1966).

    Google Scholar 

  9. V. M. Zolotarev, Opt.-Mekh. Promst.,8, 46 (1976).

    Google Scholar 

  10. T. I. Kovalevskaya and S. N. Nesterova, Fiz. Tekh. Poluprovodn.,5, No. 9, 1720 (1971).

    Google Scholar 

  11. T. I. Kovalevskaya, V. N. Drozdov, A. V. Rzhanov, and K. K. Svitashev, Mikroelektronika,3, No. 5, 404 (1974).

    Google Scholar 

  12. V. B. Aleskovskii, Stoichiometry and Synthesis of Solid Compounds [in Russian], Nauka, Leningrad (1976).

    Google Scholar 

  13. J. Fahrenfort and W. M. Visser, Spectrochim. Acta,18, 1103 (1962).

    Google Scholar 

  14. V. M. Zolotarev and L. D. Kislovskii, Prib. Tekh. Eksp.,5, 175 (1964).

    Google Scholar 

  15. G. N. Kuznetsova, M. A. Eremeeva, S. I. Kol'tsov, and V. B. Aleskovskii, Collected Transactions of the Lensovet Leningrad Technical Institute [in Russian], Leningrad (1975), p. 36.

  16. L. I. Al'perovich, Method of Dispersion Relations and Its Application in the Determination of Optical Characteristics [in Russian], IRFON, Dushanbe (1973).

    Google Scholar 

  17. A. P. Prishivalko, Reflection of Light in Absorbing Media [in Russian], Minsk (1963).

  18. S. Tanaka, Bunko Kenkyu,13, No. 2, 43 (1964).

    Google Scholar 

  19. B. A. Mikhailov and T. S. Tolstykh, Zh. Prikl. Spektrosk.,17, 119 (1972).

    Google Scholar 

  20. B. A. Mikhailov, Author's Abstract of Candidate's Disservation, Leningrad (1973).

  21. I. V. Grebenshchikov, A. G. Vlasov, B. S. Neporent, and N. V. Suikovskaya, Clarification of Optics [in Russian], Gostekhizdat, Moscow (1946).

    Google Scholar 

Download references

Authors
  1. M. A. Eremeeva
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. G. N. Kuznetsova
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. V. P. Eremeev
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 30, No. 1, pp. 129–133, January, 1979.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Eremeeva, M.A., Kuznetsova, G.N. & Eremeev, V.P. Selecting the optimum recording conditions of ATR spectra for the determination of the optical constants of thin (d<10 nm) oxide films. J Appl Spectrosc 30, 87–90 (1979). https://doi.org/10.1007/BF00612769

Download citation

  • Received:

  • Revised:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00612769

Keywords

Search

Navigation