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Spectral analysis of semiconductor silicon in a hollow-cathode discharge for impurities of elements difficult to excite

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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 25, No. 5, pp. 921–923, November, 1976.

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Rudnevskii, N.K., Pichugin, N.G. & Maksimov, D.E. Spectral analysis of semiconductor silicon in a hollow-cathode discharge for impurities of elements difficult to excite. J Appl Spectrosc 25, 1461–1463 (1976). https://doi.org/10.1007/BF00610017

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  • DOI: https://doi.org/10.1007/BF00610017

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