Skip to main content
SpringerLink
Log in

Spectroscopic determination of the degree of self-contamination of the industrial “Product 27”

  • Published:
Journal of Applied Spectroscopy Aims and scope

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Literature cited

  1. F. P. Press, Photolithography in the Production of Semiconductor Products [in Russian], Énergiya, Moscow (1968).

    Google Scholar 

  2. G. N. Rodionova, Yu. G. Tuchin, R. D. Érlikh, and N. P. Proshchenko, Élektron. Tekh., Ser. 2, No. 7 (71) 8 (1972).

    Google Scholar 

  3. V. A. Dinaburg, I. G. Erusalimchik, V. S. Zelova, R. I. Kreiman, A. F. Krivenko, N. V. Motaleva, T. M. Silaeva, V. A. Tipaeva, A. D. Trakhtenberg, and A. V. Khokhlov, Élektron. Tekh., Ser. 2, No. 7 (71), 17 (1972).

    Google Scholar 

  4. M. S. Dinaburg, G. I. Zhuravlev, Yu. I. Kol'tsov, and V. S. Korsakov, Inventor's Certificate No. 273651 (1968); Byull. Izobr., No. 20 (1970).

  5. L. A. Kazitsina and N. B. Kupletskaya, The Use of UV, IR, and NMR Spectroscopy in Organic Chemistry [in Russian], Vysshaya Shkola, Moscow (1971).

    Google Scholar 

  6. I. Ya. Bershtein and Yu. L. Kaminskii, Spectrophotometric Analysis in Organic Chemistry [in Russian], Khimiya, Leningrad (1975), pp. 11, 124, and 128.

    Google Scholar 

  7. I. Kessler, Methods of Infrared Spectroscopy and Chemical Analysis [Russian translation], Mir, Moscow (1964), pp. 127 and 136.

    Google Scholar 

  8. A. A. Babushkin, P. A. Bazhulin, F. A. Korolev, L. V. Levshin, V. K. Prokof'ev, and A. R. Striganov, Methods of Spectral Analysis [in Russian], MGU, (1962), p. 271.

Download references

Authors
  1. I. P. Zyat'kov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. M. Zubareva
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. V. Ignasheva
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. É. I. Pogotskii
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. D. I. Sagaidak
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 28, No. 6, pp. 1028–1031, June, 1978.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Zyat'kov, I.P., Zubareva, M.M., Ignasheva, A.V. et al. Spectroscopic determination of the degree of self-contamination of the industrial “Product 27”. J Appl Spectrosc 28, 700–702 (1978). https://doi.org/10.1007/BF00609776

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00609776

Keywords

Search

Navigation