Abstract
Theoretical reflectance spectra for a thin film on an infinite substrate (such as an oxide layer on a metal) have been calculated, to assess the combined effects of absorption bands, interference and surface structure on film identification and the accuracy of film thickness measurements.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
G. C. Allen, P. J. F. Harris, and G. A. Swallow,Surf. Tech. 6, 111 (1977).
R. W. Ditchburn,Light (Blackie and Son Ltd., London, 1952).
O. S. Heavens,Optical Properties of Thin Films (Dover, New York, 1965).
P. B. Johnson and R. W. Christy,Phys. Rev.,B9, 5056 (1974).
J. M. Ziman,Principles of the Theory of Solids (CUP, 1965).
F. Seitz,The Modern Theory of Solids (McGraw-Hill, New York, 1940).
W. W. Wendlandt and H. G. Hecht,Reflectance Spectroscopy (Wiley-Interscience, New York, 1966).
R. C. Weast, ed.C.R.C. Handbook of Chemistry and Physics (C.R.C. Press Inc., 1980).
D. R. Renneke and D. W. Lynch,Phys. Rev. 138(2A), 530 (1965).
M. M. Kirillova and L. V. Nomerovannaya,Phys. Met. Metall. 40(5), 69 (1977).
A. S. Barker and J. A. Ditzenberger,Phys. Rev. B2(11), 4378 (1970).
G. C. Allen and G. A. Swallow,Oxid. Met. 17, 157 (1982).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Swallow, G.A., Allen, G.C. Reflectance spectroscopy of oxide films. I. A theoretical study. Oxid Met 17, 141–156 (1982). https://doi.org/10.1007/BF00606197
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/BF00606197