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Journal of Materials Science Letters

, Volume 13, Issue 8, pp 551–553 | Cite as

Evaluation of high temperature sulphidation protection provided by amorphous Si/SiO2 coatings produced by ArF excimer laser chemical vapour deposition

  • J. Pou
  • P. González
  • D. Fernández
  • E. García
  • B. Léon
  • M. Pérez-Amor
  • S. J. Spencer
  • S. R. J. Saunders
Article

Keywords

Polymer Chemical Vapour Deposition Vapour Deposition Chemical Vapour Excimer Laser 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman & Hall 1994

Authors and Affiliations

  • J. Pou
    • 1
  • P. González
    • 1
  • D. Fernández
    • 1
  • E. García
    • 1
  • B. Léon
    • 1
  • M. Pérez-Amor
    • 1
  • S. J. Spencer
    • 2
  • S. R. J. Saunders
    • 2
  1. 1.Department of Applied PhysicsUniversity of VigoVigoSpain
  2. 2.Division of Materials MetrologyNational Physical LaboratoryTeddingtonUK

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