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Evaluation of high temperature sulphidation protection provided by amorphous Si/SiO2 coatings produced by ArF excimer laser chemical vapour deposition

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Authors and Affiliations

  1. Department of Applied Physics, University of Vigo, PO Box 62, 36280, Vigo, Spain

    J. Pou, P. González, D. Fernández, E. García, B. Léon & M. Pérez-Amor

  2. Division of Materials Metrology, National Physical Laboratory, TW11 OLW, Teddington, Middlesex, UK

    S. J. Spencer & S. R. J. Saunders

Authors
  1. J. Pou
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  2. P. González
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  3. D. Fernández
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  4. E. García
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  5. B. Léon
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  6. M. Pérez-Amor
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  7. S. J. Spencer
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  8. S. R. J. Saunders
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Pou, J., González, P., Fernández, D. et al. Evaluation of high temperature sulphidation protection provided by amorphous Si/SiO2 coatings produced by ArF excimer laser chemical vapour deposition. J Mater Sci Lett 13, 551–553 (1994). https://doi.org/10.1007/BF00592605

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  • DOI: https://doi.org/10.1007/BF00592605

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