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Growth of BN film on Si substrate by carbothermic reduction of boric acid in nitrogen glow discharge plasma

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Journal of Materials Science Letters

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  1. Institute for Plasma Research, 382 424, Bhat Gandhinagar, India

    B. B. Nayak

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  1. B. B. Nayak
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Nayak, B.B. Growth of BN film on Si substrate by carbothermic reduction of boric acid in nitrogen glow discharge plasma. J Mater Sci Lett 14, 337–339 (1995). https://doi.org/10.1007/BF00592143

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  • DOI: https://doi.org/10.1007/BF00592143

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