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Effects of oxygen in sputtering gas on lead-zirconate-titanate thin film formed byin situ process

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Materials Engineering, University of Hanyang, 133-791, Seoul, Korea

    Y. S. Hwang & S. H. Paek

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  1. Y. S. Hwang
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  2. S. H. Paek
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Hwang, Y.S., Paek, S.H. Effects of oxygen in sputtering gas on lead-zirconate-titanate thin film formed byin situ process. J Mater Sci Lett 14, 322–323 (1995). https://doi.org/10.1007/BF00592138

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  • DOI: https://doi.org/10.1007/BF00592138

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