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OH-related capacitance-voltage recovery effect in MOS capacitors passivated by ZnO-B2O3-SiO2-P2O5 glasses part VIIIthe effects of SrF 2 and BeO contents

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Toshiba ULSI Research and Development Center, 1-Komukai, Toshiba-cho Kawasaki, Japan

    Keiji Kobayashi & Ichiro Mizushima

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  1. Keiji Kobayashi
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  2. Ichiro Mizushima
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Kobayashi, K., Mizushima, I. OH-related capacitance-voltage recovery effect in MOS capacitors passivated by ZnO-B2O3-SiO2-P2O5 glasses part VIIIthe effects of SrF 2 and BeO contents. J Mater Sci Lett 15, 357–359 (1996). https://doi.org/10.1007/BF00591662

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  • DOI: https://doi.org/10.1007/BF00591662

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