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Polymeric aluminasilazane precursors for aluminosilicon nitride

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Chemistry, Massachusetts Institute of Technology, 02139, Cambridge, MA, USA

    D. Seyferth, G. Brodt & B. Boury

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  1. D. Seyferth
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  2. G. Brodt
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  3. B. Boury
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Seyferth, D., Brodt, G. & Boury, B. Polymeric aluminasilazane precursors for aluminosilicon nitride. J Mater Sci Lett 15, 348–349 (1996). https://doi.org/10.1007/BF00591659

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  • DOI: https://doi.org/10.1007/BF00591659

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