Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method

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References

  1. 1.

    A. Sokolowska, in “Non-conventional methods of materials synthesis” (PWN, Warsaw, 1991) (in Polish).

    Google Scholar 

  2. 2.

    A. Michalski,J. Mater. Sci. Lett. 10 (1991) 503.

    Google Scholar 

  3. 3.

    M. Coster andJ. L. Chermant in “Precis d'analyse d'images” (CNRS, Paris, 1989) (in French).

    Google Scholar 

  4. 4.

    K. J. Kurzydlowski, K. J. Mctaggart andK. Tangri,Phil. Mag. 61 (1990) 61.

    Google Scholar 

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Rożniatowski, K., Michalski, A. & Kurzydlowski, K.J. Quantitative description of the growth kinetics and morphology of TiN thin films produced by a physical vapour deposition method. J Mater Sci Lett 15, 317–319 (1996). https://doi.org/10.1007/BF00591649

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Keywords

  • Polymer
  • Thin Film
  • Vapour Deposition
  • Growth Kinetic
  • Quantitative Description