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ZrO2-TiO2 ceramic humidity sensors

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Abstract

Ceramics based on 0.5ZrO2-0.5TiO2 were evaluated as humidity sensors. The variation of phase change, microstructure, and conductivity with relative humidity were investigated for base ceramics doped with additives such as CrO1.5, FeO1.5 and MgO. It was found that FeO1.5 enhanced the formation of ZrTiO4. The addition of MgO and FeO1.5 increased conductivity and its humidity sensitivity. Open porosity was not affected much by the addition of the three dopants. Nitrogen treatment of sintered ceramics at 900 °C was found to increase conductivities and humidity sensitivity of the ceramics.

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Authors and Affiliations

  1. Department of Materials Science and Engineering, National Tsing Hua University, 30043, Hsinchu, Taiwan

    Seng -Lu Yang & Jenn -Ming Wu

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  1. Seng -Lu Yang
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  2. Jenn -Ming Wu
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Yang, S.L., Wu, J.M. ZrO2-TiO2 ceramic humidity sensors. J Mater Sci 26, 631–636 (1991). https://doi.org/10.1007/BF00588297

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