Skip to main content
Log in

General expression for the temperature coefficient of resistivity of polycrystalline semi-metal films

  • Papers
  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

After calculating the different contributions to the resistivity of a thin film, a general expression for the temperature coefficient of resistivity in a polycrystalline semi-metal film is derived by taking into consideration the influence of internal size effects on the film resistivity in terms of the Mayadas-Shatzkes function, thermal strains and the difference in the thermal expansion coefficients between the film and its substrate. A comparison with experimental data, in the temperature range 77 to 500 K, over grain size range 30 to 200 nm, for antimony films, 200 nm thick, is made. Good agreement has been found between experiments and the theoretical equations we proposed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. L. Maissel, “Handbook of thin Film Technology” (McGraw Hill, New York, 1970) p. 13.

    Google Scholar 

  2. K. Fuchs,Proc. Cambridge Philos. Soc. 34 (1938) 100.

    Google Scholar 

  3. E. Sondheimer,Adv. Phys. 1 (1952) 8.

    Google Scholar 

  4. D. Deschacht, A. Boyer andE. Groubert,Thin Solid Films 70 (1980) 311.

    Google Scholar 

  5. A. Mayadas andM. Shatzkes,Phys. Rev. B 1 (1970) 1382.

    Google Scholar 

  6. J. Thompson,Thin Solid Films 18 (1973) 77.

    Google Scholar 

  7. E. Mola andJ. Heras,ibid. 18 (1973) 137.

    Google Scholar 

  8. C. Tellier andA. Tosser,ibid. 43 (1977) 261.

    Google Scholar 

  9. O. Öktu andG. Saunders,Proc. Phys. Soc. 91 (1967) 156.

    Google Scholar 

  10. C. Pariset,Thin Solid Films 91 (1982) 301.

    Google Scholar 

  11. A. Boyer, D. Deschacht andE. Groubert, 3rd International Congress on Cathodic Sputtering and Related Applications Nice 11–14 September 1979 (Société Française du Vide, 1979).

  12. C. Pichard, C. Tellier andA. Tosser,J. Phys. D Appl. Phys. 13 (1980) 1325.

    Google Scholar 

  13. P. Thureau, B. Laniepce andP. Jourdain,Rev. Française de Mécanique 10–11 (1964) 7.

    Google Scholar 

  14. QUARTEX Documentation Société pour l'application des hautes températures silice et quartz vitrifiés, céramiques électroniques, Paris.

  15. C. Hodgman, “Handbook of Chemistry and Physics” (The Chemical Rubber Publishing Co, Cleveland, Ohio, 1963).

    Google Scholar 

  16. G. Kuczynski,Phys. Rev. 94 (1954) 61.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Deschacht, D., Boyer, A. General expression for the temperature coefficient of resistivity of polycrystalline semi-metal films. J Mater Sci 20, 807–811 (1985). https://doi.org/10.1007/BF00585718

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00585718

Keywords

Navigation