Journal of Materials Science

, Volume 2, Issue 4, pp 378–387 | Cite as

Etching studies of beryllium oxide crystals

  • S. B. Austerman
  • J. B. Newkirk
  • D. K. Smith
  • H. W. Newkirk


Chemical etching behaviour of BeO crystals was investigated for selected etchants ranging from basic to acidic in nature. Surface-emergent defects (dislocations, enclosed platinum crystals, point-defect concentrations, surface mechanical damage, twin boundaries) give rise to recognisable etch figures that are characteristic of etchant, defect type, and orientation of emergence face. Gross etching rates (in the absence of surface-emergent defects) are strongly anisotropic for both basic and acidic etchants, reflecting the crystallographic polarity of the BeO crystal structure; intermediate etchants give nearly isotropic etching. The details of gross and figure etching are described.


Beryllium Mechanical Damage Twin Boundary Etching Rate Chemical Etching 
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  1. 1.
    H. G. Van Bueren, “Imperfections in Crystals” (Interscience, New York, 1960), pp. 128–33.Google Scholar
  2. 2.
    J. W. Faust, Jr, “Etching of the III–V Intermetallic Compounds”, “Compound Semiconductors”, Vol. I (Reinhold, New York, 1962), pp. 445–68.Google Scholar
  3. 3.
    R. C. Rau,J. Amer. Ceram. Soc. 46 (1963) 484.Google Scholar
  4. 4.
    D. K. Smith, H. W. Newkirk, andJ. S. Kahn,J. Electrochem. Soc. 111 (1964) 78.Google Scholar
  5. 5.
    S. B. Austerman, D. A. Berlincourt, andH. H. A. Krueger,J. Appl. Phys. 34 (1963) 339.Google Scholar
  6. 6.
    S. B. Austerman,Bull. Amer. Phys. Soc. 7 (1962) 607.Google Scholar
  7. 7.
    R. R. Vandervoort andW. L. Barmore,J. Appl. Phys. 37 (1966) 4483.Google Scholar
  8. 8.
    S. B. Austerman,J. Nucl. Matls. 14 (1964) 225.Google Scholar
  9. 9.
    H. W. Newkirk andD. K. Smith,Amer. Mineral. 50 (1965) 44.Google Scholar
  10. 10.
    S. B. Austerman andW. G. Gehman,J. Matls. Sci. 1 (1966) 249.Google Scholar
  11. 11.
    S. B. Austerman, J. B. Newkirk, andD. K. Smith,J. Appl. Phys. 36 (1965) 3815.Google Scholar
  12. 12.
    G. Nomarski andA. R. Wert,Revue de Metallurgie 52 (1955) 121.Google Scholar
  13. 13.
    G. G. Bentle andK. T. Miller, “Dislocations, Slip, and Fracture in BeO Single Crystals,”J. Appl. Phys., in press.Google Scholar
  14. 14.
    H. C. Gatos,Science 137 (August 1962) 3527.Google Scholar
  15. 15.
    A. A. Ballman,J. Cryst. Growth 1 (1967) 46.Google Scholar

Copyright information

© Chapman and Hall 1967

Authors and Affiliations

  • S. B. Austerman
    • 1
  • J. B. Newkirk
    • 2
  • D. K. Smith
    • 3
  • H. W. Newkirk
    • 3
  1. 1.Atomics InternationalCanoga ParkUSA
  2. 2.University of DenverDenverUSA
  3. 3.Lawrence Radiation LaboratoryLivermoreUSA

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