Hydrogen profile analysis in a-C:H films by elastic recoil detection (ERD)

  • K. Schmidt
  • K. Reichelt
  • B. Stritzker
  • J. Zou


The measurement of hydrogen profiles in diamond-like carbon films (a-C∶H) by elastic recoil detection (ERD) and the decrease of the H content after irradiation with Ni ions are described.


Hydrogen Physical Chemistry Analytical Chemistry Inorganic Chemistry Profile Analysis 
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Wasserstoffprofilanalyse in a-C:H-Filmen durch elastische Rückstoß-Detektion (ERD)


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  1. 1.
    Mort J, Jansen F (eds) Plasma deposited thin films, chap 4. CRC Press, Boca Raton, FlaGoogle Scholar
  2. 2.
    Enke K (1985) Appl Optics 24:508Google Scholar
  3. 3.
    Zou JW, Schmidt K, Reichelt K, Stritzker B (1988) J Vac Sci Technol A 6:3103–3104Google Scholar
  4. 4.
    L'Ecuyer J, Brassard C, Cardinal C (1978) Nucl Instrum Methods 149:271Google Scholar
  5. 5.
    Doyle BL, Peercy PS (1979) Appl Phys Lett 34:811Google Scholar
  6. 6.
    Wielunski L, Benenson R, Horn K, Lanford WA (1986) Nucl Instrum Methods B15:469Google Scholar
  7. 7.
    Doolittle LR (1985) Nucl Instrum Methods B9:344Google Scholar
  8. 8.
    Wang Y, Chen J, Huang F (1986) Nucl Instrum Methods B17:11Google Scholar
  9. 9.
    Chu WK, Mayer JW, Nicolet MA (1978) Backscattering spectrometry, chap 3. Academic Press, New YorkGoogle Scholar
  10. 10.
    Bierfeld HJ, private communicationGoogle Scholar
  11. 11.
    Ziegler JF, Biersack JP, Littmark U (1985) The stopping and range of ions in solids. Pergamon Press, New YorkGoogle Scholar
  12. 12.
    Westerberg L, Svensson LE, Karlsson E, Richardson MW, Lundstrom K (1985) Nucl Instrum Methods B9:49Google Scholar
  13. 13.
    Amsel G, Cohen C, Maurel B (1986) Nucl Instrum Methods B14:226Google Scholar
  14. 14.
    Nagata S, Yamaguchi S, Fujino Y, Hori Y, Sugiyama N, Kamada K (1985) Nucl Instrum Methods B6:533Google Scholar
  15. 15.
    L'Hoir A, Schmaus D (1984) Nucl Instrum Methods B4:1Google Scholar

Copyright information

© Springer-Verlag 1989

Authors and Affiliations

  • K. Schmidt
    • 1
  • K. Reichelt
    • 1
  • B. Stritzker
    • 1
  • J. Zou
    • 1
  1. 1.Institut für Schicht- und IonentechnikKernforschungsanlage Jülich GmbHJülichFederal Republic of Germany

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