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SIMS depth profiling using new gate techniques

SIMS-Tiefenprofilanalyse mit Hilfe neuer Gate-Verfahren

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References

  1. Wittmaack K (1976) In: Meyer O et al. (eds) Proc 2nd Int Conf Beam Surface Layer Analysis. Plenum Press, New York, p 649

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  2. v. Criegern R, Weitzel I, Fottner J (1984) Proc 4th Int Conf on SIMS. Springer, Berlin Heidelberg New York, p 308

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  3. Frenzel H, Maul JL, Mertens H, Raab R, Scholze Ch (1987) Proc SIMS VI. Wiley, New York, p 219

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Authors and Affiliations

  1. Perkin-Elmer Atomika Technische Physik GmbH, D-8042, Oberschleißheim, Federal Republic of Germany

    J. L. Maul & H. Frenzel

Authors
  1. J. L. Maul
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  2. H. Frenzel
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Maul, J.L., Frenzel, H. SIMS depth profiling using new gate techniques. Z. Anal. Chem. 333, 318 (1989). https://doi.org/10.1007/BF00572314

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  • DOI: https://doi.org/10.1007/BF00572314

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