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Measurement of the Young's modulus for structural characterization of amorphous Si:C:N:H-films

E-Modul-Messungen zur strukturellen Charakterisierung dünner amorpher Si:C:N:H-Schichten

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References

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Author notes

  1. K. Taube

    Present address: Forschungslaboratorium Hamburg, Philips GmbH, Vogt-Kölln-Strasse 30, D-2000, Hamburg 54, Federal Republic of Germany

Authors and Affiliations

  1. Forschungslaboratorium Hamburg, Philips GmbH, Vogt-Kölln-Strasse 30, D-2000, Hamburg 54, Federal Republic of Germany

    K. W. Gerstenberg

  2. Institut für physikalische Chemie, Universität Hamburg, D-2000, Hamburg 13, Federal Republic of Germany

    K. Taube

Authors
  1. K. W. Gerstenberg
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  2. K. Taube
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Gerstenberg, K.W., Taube, K. Measurement of the Young's modulus for structural characterization of amorphous Si:C:N:H-films. Z. Anal. Chem. 333, 313–314 (1989). https://doi.org/10.1007/BF00572312

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  • DOI: https://doi.org/10.1007/BF00572312

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