Multidimensional image acquisition and processing in surface analysis

  • F. G. Rüdenauer
Article

Summary

Modern methods of surface microanalysis are capable to perform the measurement of spatially 3-dimensional element distributions in solid samples. Image processing techniques are used to control data acquisition, display and postprocessing in this new 3D-analytical mode. Interfacing of image processing systems to existing ion- and electron microprobes is discussed.

Keywords

Physical Chemistry Analytical Chemistry Inorganic Chemistry Image Processing Data Acquisition 

Multidimensional Bildakquisition und Verarbeitung in der Oberflächenanalyse

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Copyright information

© Springer-Verlag 1989

Authors and Affiliations

  • F. G. Rüdenauer
    • 1
  1. 1.Österreichisches Forschungszentrum SeibersdorfSeibersdorfAustria

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