Multidimensional image acquisition and processing in surface analysis

  • F. G. Rüdenauer


Modern methods of surface microanalysis are capable to perform the measurement of spatially 3-dimensional element distributions in solid samples. Image processing techniques are used to control data acquisition, display and postprocessing in this new 3D-analytical mode. Interfacing of image processing systems to existing ion- and electron microprobes is discussed.


Physical Chemistry Analytical Chemistry Inorganic Chemistry Image Processing Data Acquisition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Multidimensional Bildakquisition und Verarbeitung in der Oberflächenanalyse


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  1. 1.
    Patkin AJ, Morrison GH (1982) Anal Chem 54:2208Google Scholar
  2. 2.
    Rüdenauer FG, Steiger W (1981) Mikrochim Acta Suppl II: 375Google Scholar
  3. 3.
    Riahi A (1987) PhD thesis, Technical University of ViennaGoogle Scholar
  4. 4.
    Berkey E (1973) In: McCall JL, Mueller WM (eds) Microstructural analysis, tools and techniques. Plenum Press, New YorkGoogle Scholar
  5. 5.
    Rüdenauer FG (1984) Surf Interface Anal 6:132Google Scholar
  6. 6.
    Benninghoven A, Rüdenauer FG, Werner HW (1987) Secondary ion mass spectrometry. Wiley, New YorkGoogle Scholar
  7. 7.
    Levi-Setti R, Chabala JM, Wang YL (1988) Ultramicroscopy 24:97Google Scholar
  8. 8.
    Fathers DJ, Wolstenhome J (1986) In: Brown JD, Packwood R (eds) Proc 11th Int Congress on X-Ray Optics and Microanalysis. Faculty of Engineering Science, University of W. Ontario, London (W. Ontario), Canada, p 222Google Scholar
  9. 9.
    Kontron, Bildanalyse, Eching, FRGGoogle Scholar
  10. 10.
    Gnaser H, Rüdenauer FG, Studnicka H, Poffinger P (1982) In: Andren HO, Norden H (eds) Proc 29th Int Field Emission Symposium. Almquist and Wiksell, Stockholm, p. 401Google Scholar
  11. 11.
    Beske HE, private communicationGoogle Scholar

Copyright information

© Springer-Verlag 1989

Authors and Affiliations

  • F. G. Rüdenauer
    • 1
  1. 1.Österreichisches Forschungszentrum SeibersdorfSeibersdorfAustria

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