Plasma Chemistry and Plasma Processing

, Volume 5, Issue 2, pp 183–199 | Cite as

Spatially resolved optical emission studies of fluorocarbon RF plasma through the use of UV-transmitting optical fibers

  • G. S. Selwyn
  • E. Kay
Article

Abstract

A technique for collecting spatially resolved optical emission from large rf plasma reactors is described. To demonstrate the sensitivity and versatility of this technique, emission within the quartz ultraviolet, 225–253 nm, was studied with particular emphasis on the “plasma dark space.” Spatial variations of CF2, AlF, and C atom emission were monitored. These results have been used for discussion and evaluation of various plasma excitation and reaction mechanisms involving atomic carbon in fluorocarbon plasmas.

Key words

Spatial resolution optical emission rf plasma RIE AlF CF2 carbon atom fluorocarbon 

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References

  1. 1.
    J. W. Coburn and M. Chen,J. Appl. Phys. 51, 3134 (1980).Google Scholar
  2. 2.
    J. W. Coburn and M. Chen,J. Vac. Sci. Tech. 18, 353 (1981).Google Scholar
  3. 3.
    R. d'Agostino, F. Cramarossa, S. DeBenedictis, and G. Ferrano,J. Appl. Phys. 52, 1259 (1981).Google Scholar
  4. 4.
    R. d'Agostino, V. Colaprico, and F. Cramarossa,Plasma Chem. Plasma Process. 1, 365 (1981).Google Scholar
  5. 5.
    R. A. Gottscho and T. A. Miller,Pure Appl. Chem. 56, 189 (1984).Google Scholar
  6. 6.
    R. A. Gottscho and V. M. Donnelly,J. Appl. Phys. 56, 245 (1984).Google Scholar
  7. 7.
    R. Walkup, Ph. Avouris, R. W. Dreyfus, J. M. Jasinski, and G. S. Selwyn,Appl. Phys. Lett. 45, 372 (1984).Google Scholar
  8. 8.
    R. E. Walkup, R. W. Dreyfus, and Ph. Avouris,Phys. Rev. Lett. 50, 1846 (1983).Google Scholar
  9. 9.
    W. K. Bischel, B. E. Perry, and D. R. Crosley,Chem. Phys. Lett. 82, 85 (1981);Appl. Opt. 21, 1419 (1982).Google Scholar
  10. 10.
    L. F. DiMauro, R. A. Gottscho, and T. A. Miller,J. Appl. Phys. 56, 2007 (1984).Google Scholar
  11. 11.
    K. L. Saenger, R. E. Walkup, and G. S. Selwyn, Fifth Symposium on Plasma Processing, ECS National Meeting (in the proceedings), New Orleans, Louisiana, October 1984.Google Scholar
  12. 12.
    W. D. Westwood and R. J. Boynton,J. Appl. Phys. 44, 2610 (1973).Google Scholar
  13. 13.
    R. A. Gottscho, G. P. Davis, and R. H. Burton,Plasma Chem. Plasma Process. 3, 193 (1983).Google Scholar
  14. 14.
    A. Dilks and E. Kay, inPlasma Polymerization, M. Shen and A. T. Bell, eds.,Chem. Soc. Symp. Ser. 108, 193 (1979).Google Scholar
  15. 15.
    R. W. B. Pearse and A. G. Gaydon,The Identification of Molecular Spectra, Wiley, New York (1974).Google Scholar
  16. 16.
    E. Y. Y. Lam, P. Gaspar, and A. P. Wolf,J. Phys. Chem. 75, 445 (1971).Google Scholar
  17. 17.
    R. E. Klinger and J. E. Greene,Appl. Phys. Lett. 38, 620 (1981).Google Scholar
  18. 18.
    R. E. Klinger and J. E. Greene,J. Appl. Phys. 54, 1595 (1983).Google Scholar
  19. 19.
    K. Miyake, S. Tachi, K. Yagi, and T. Tokuyama,J. Appl. Phys. 53, 3214 (1984).Google Scholar
  20. 20.
    S. Dzioba and H. M. Naguib,J. Appl. Phys. 53, 4389 (1982).Google Scholar
  21. 21.
    G. S. Selwyn, unpublished results (1983).Google Scholar
  22. 22.
    S. R. J. Brueck and S. Pang, paper C-5-5 of 6th Int. Symp. Plasma Chem., IUPAC, Montreal, Canada, July 1983.Google Scholar
  23. 23.
    I. S. T. Tsong inInelastic Particle-Surface Collisions, E. Taglover and W. Heiland, eds. Springer Series in Chemical Physics, Vol. 17, Springer-Verlag, New York (1981), p. 258.Google Scholar
  24. 24.
    W. L. Wiese, M. W. Smith, and B. M. Glennon,Atomic Transition Probabilities, NBS Monograph NSRDS-NBS-4 (1966).Google Scholar
  25. 25.
    S. Bashkin and J. O. Stoner, Jr.,Atomic Energy Levels and Grotrian Diagrams, Vol. I, North-Holland, Amsterdam (1975), pp. 56–63.Google Scholar
  26. 26.
    G. M. Meaburn and D. Perner,Nature London) 212, 1042 (1966).Google Scholar
  27. 27.
    R. M. Roth, K. G. Spears, and G. Wong,Appl. Phys. Lett. 45, 28 (1984).Google Scholar
  28. 28.
    J. E. Greene,J. Vac. Sci. Technol. 15, 1718 (1978).Google Scholar
  29. 29.
    R. K. Nesbet, inAdvances in Atomic and Molecular Physics, D. R. Bates and B. Bederson, eds., Academic Press, New York (1977).Google Scholar
  30. 30.
    S. Geltman,Topics in Atomic Collision Theory, Academic Press, New York (1969), pp. 103–113.Google Scholar
  31. 31.
    R. J. Donovan and H. M. Gillespie, inReaction Kinetics Vol. 1, P. G. Ashmore, ed., Specialist Periodical Reports, The Chem. Soc., London (1974), p. 14.Google Scholar

Copyright information

© Plenum Publishing Corporation 1985

Authors and Affiliations

  • G. S. Selwyn
    • 1
  • E. Kay
    • 1
  1. 1.IBM Research LaboratorySan Jose

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