Plasma Chemistry and Plasma Processing

, Volume 3, Issue 1, pp 63–78 | Cite as

Dissociation and recombination of oxygen atoms produced in a microwave discharge. Part I. Experiment

  • M. Brake
  • J. Hinkle
  • J. Asmussen
  • M. Hawley
  • R. Kerber


A microwave-initiated plasma (2.44 GHz) flow system has been developed to generate and detect atomic oxygen as a function of distance from the discharge exit. It was found that an increase in power or a decrease in pressure resulted in larger amounts of atomic oxygen at specific points downstream from the discharge. Flow rate had little effect on the production of atoms, but increasing the flow rate did result in increasing the yield of oxygen atoms. The largest dissociation measured was 70% at a pressure of 12 Torr, a flow rate of 0.4 cm3/sec, and 500 W of absorbed power.

Key words

Microwave discharge nitrogen dioxide titration oxygen plasma 


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  1. 1.
    J. Battey, Design Criteria for Uniform Reaction Rates in an Oxygen Plasma,IEEE Trans. Electron Devises 24 140 (1977).Google Scholar
  2. 2.
    A. Bell and K. Kwong, Dissociation of Oxygen in a Radiofrequency Electrical Discharge,AIChE J. 18 990 (1972).Google Scholar
  3. 3.
    A. Mearns and A. Morris, Oxidation Reactions in a Microwave Discharge: Factors Affecting Efficiency of Oxygen Atom Production,Chem. Eng. Prog. Ser. 112 37 (1971).Google Scholar
  4. 4.
    F. D. Francis, The Production of Oxygen Atoms in a Microwave Discharge and the Recombination Kinetics in a Gas Flow System,J. Appl. Phys. 2 1717 (1969).Google Scholar
  5. 5.
    R. McCarthy, Chemical Synthesis from Free Radical Production in Microwave Fields,J. Chem. Phys. 22 1360 (1954).Google Scholar
  6. 6.
    S. Mertz, M. Hawley, and J. Asmussen, An Experimental Study of Reactions of CO and H2 in a Continuous Flow Microwave Discharge Region,IEEE Trans. Plasma Sci. PS-2(4, 297 (1974).Google Scholar
  7. 7.
    J. Asmussen, R. Mallavarpu, J. Hamann, and H. Park, The Design of a Microwave Plasma Cavity,Proc. IEEE 62 109 (1974).Google Scholar
  8. 8.
    F. Klein and J. Herron, Mass Spectrometric Study of the Reactions of O atoms with NO and NO2,J. Chem. Phys. 41 1285 (1964).Google Scholar
  9. 9.
    F. Kaufman, The Air Afterglow and Its Uses in The Study of Some Reactions of Atomic Oxygen,Proc. R. Soc. London 247 123 (1958).Google Scholar
  10. 10.
    F. Klein and J. Herron, Rate of Recombination of Oxygen Atoms with Oxygen Molecules,J. Chem. Phys. 41 1285 (1964).Google Scholar
  11. 11.
    M. Brake and R. Kerber, Dissociation and Recombination of Oxygen Atoms Produced in a Microwave Discharge, Part II, Theoretical Calculations,J. Plasma Chem. Plasma Process. 3 79 (1983).Google Scholar
  12. 12.
    M. Clyne, Reactions of Atoms and Free Radicals Studied in Discharge Flow Systems, inPhysical Chemistry of Fast Reactions, B. P. Levitt, ed., Plenum Press, New York (1973).Google Scholar
  13. 13.
    A. Mearns and A. Morris, Use of the Nitrogen Dioxide Titration Technique for Oxygen Atom Determination at Pressures above 2 Torr,J. Phys. Chem. 74 3999 (1970).Google Scholar

Copyright information

© Plenum Publishing Corporation 1983

Authors and Affiliations

  • M. Brake
    • 1
  • J. Hinkle
    • 1
  • J. Asmussen
    • 1
  • M. Hawley
    • 1
  • R. Kerber
    • 1
  1. 1.College of EngineeringMichigan State UniversityEast Lansing

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