Plasma Chemistry and Plasma Processing

, Volume 5, Issue 4, pp 293–316 | Cite as

Plasma-chemical reactions in weakly decomposed CCl4

  • F. -W. Breitbarth
  • H. -J. Tiller
  • R. Reinhardt


For the case of weak feed gas decomposition, where the concentration of CCl4 exceeds those of decomposition and built-up products, the emission of CCl* is shown to originate from dissociative excitation of CCl4. With electron concentration measured independently, the kinetics of CCl4 decomposition has been extracted from the time dependence of the CCl* intensity. Supported by EPR determinations of radical concentrations in rapidly flowing CCl4 and CCl4/O2 afterglows, the primary decomposition reaction is shown to be the electron impact dissociation into CCl3 and Cl. Its rate constant (k1=4×10−8 cm3s−1) indicates strongly that dissociative electron attachment is the main reaction channel at least at r.f. power densities just above the threshold of a self-maintaining discharge. At extremely low mean electron energies the emission of a continuum is observed, which is tentatively ascribed to the radiative CCl3-Cl recombination.

Key words

Plasma chemistry halocarbon decomposition kinetics 


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Copyright information

© Plenum Publishing Corporation 1985

Authors and Affiliations

  • F. -W. Breitbarth
    • 1
  • H. -J. Tiller
    • 1
  • R. Reinhardt
    • 1
  1. 1.Department of ChemistryFriedrich Schiller UniversityJenaGDR

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