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Effects of high-energy ion implantation into metals

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Abstract

The laws and features of the formation of phase-structural states and defect formation during high-energy (E ≥100 MeV) ion implantation are reviewed. We consider the salient feature of such action in solids, namely, strong electron excitations in the solids and, therefore, the dominant value of electron stopping of ions; formation of buried tracks; and abrupt increase in the role of electron excitations in the generation of structural defects. High-energy and multiple-energy implantation is shown to be effective in modifying the physicomechanical properties of solids because of the formation of deep-lying doped layers and the considerable thickness of the ion-modified surface layer of the target.

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  1. Institute of Applied Physical Problems, Belarus State University, Russia

    F. F. Komarov

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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 5, pp. 23–40, May, 1994.

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Komarov, F.F. Effects of high-energy ion implantation into metals. Russ Phys J 37, 423–436 (1994). https://doi.org/10.1007/BF00560113

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