Russian Physics Journal

, Volume 37, Issue 5, pp 410–422 | Cite as

Modeling of the impurity distribution obtained by ion implantation

  • V. G. Abdrashitov
  • V. V. Ryzhov
Article
  • 19 Downloads

Abstract

Models and a suite of programs (TRION, PIRSON, CHAPS, and DYCOD) that make it possible to calculate the impurity distribution for any implantation dose in a target with arbitrary composition are described. Test calculations for each program showed that the results are in good agreement with experimental data and with theoretical calculations performed by other authors. The suite of programs is intended for the development of the physical principals of ion-beam technologies.

Keywords

Experimental Data Theoretical Calculation Test Calculation TRION Impurity Distribution 

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Copyright information

© Plenum Publishing Corporation 1994

Authors and Affiliations

  • V. G. Abdrashitov
    • 1
  • V. V. Ryzhov
    • 1
  1. 1.Institute of High-Current Electronics, Siberian BranchRussian Academy of SciencesRussia

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