Abstract
A method of measuring the resistance of contacts on thin semiconducting layers is proposed. Computational formulas and relations for calculating the contact resistance and electrical conductivity of the semiconducting layer are obtained from the solution of the corresponding boundary value problem in electrodynamics. The proposed technique makes it possible to use computers for processing the experimental data obtained for the contacts under investigation. The error introduced by employing the thin sample approximation is estimated.
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Additional information
Education Institute, Lipetsk. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 6, pp. 116–121, June, 1992.
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Polyakov, N.N. Measurement of the resistance of contacts on semiconducting layers. Russ Phys J 35, 585–589 (1992). https://doi.org/10.1007/BF00559188
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DOI: https://doi.org/10.1007/BF00559188