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Russian Physics Journal

, Volume 37, Issue 6, pp 558–566 | Cite as

Unconventional methods of pulsed-periodic ion-beam and ion-plasma treatment of materials

  • A. I. Ryabchikov
Solid-State Physics

Abstract

The article reviews studies on the development of new methods of ion treatment of materials. New approaches are considered to multielement implantation on the basis of pulsed-periodic formation of composition-controlled ion fluxes. Various ways of obtaining high implant concentrations and forming thick and thin coatings by pulsed-periodic irradiation of materials with with ion beams and plasma streams alternating in time are discussed. Unconventional methods of treatment of inside surfaces of products are considered.

Keywords

Inside Surface Thin Coating Plasma Stream Unconventional Method 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    M. I. Guseva, Poverkhnost', No. 4, 27 (1982).Google Scholar
  2. 2.
    A. N. Didenko, A. E. Ligachev, and I. B. Kurakin, Effect of Charged-Particle Beams on the Surface of Metals and Alloys [in Russian], Energoatomizdat, Moscow (1987).Google Scholar
  3. 3.
    J. Hirvonen, Ion Implantation [Russian translation], Metallurgiya, Moscow (1985).Google Scholar
  4. 4.
    M. I. Guseva, Itogi Nauki Tekh. Ser. Fiz. Osnovy Lazernoi Puchkovoi Tekhnol., Vol. 5, VINITI (All-Union Institute of Scientific and Technical Information), Moscow (1989), p. 5.Google Scholar
  5. 5.
    V. L. Auslender, Doctoral Dissertation [in Russian], Novosibirsk (1986).Google Scholar
  6. 6.
    *As in Russian original — Publisher.Google Scholar
  7. 7.
    V. M. Bystritskii and A. N. Didenko, High-Power Ion Beams [in Russian], Énergoatomizdat, Moscow (1984).Google Scholar
  8. 8.
    G. A. Mesyats, High-Current Pulsed Electron Beams in Technology [in Russian], Nauka, Novosibirsk (1983).Google Scholar
  9. 9.
    I. N. Meshkov, L. I. Frantsenyuk, and V. N. Lazarev, Abstracts of Papers Read at the Second All-Union Conference on Charged-Particle Beam Modification of Properties of Structural Materials. Vol. 2 [in Russian], Sverdlovsk (1991), pp. 54–56.Google Scholar
  10. 10.
    L. Pranyavichyus and Yu. Dudonis, Ion-Beam Modification of Properties of Solids [in Russian], Vilnius (1980).Google Scholar
  11. 11.
    I. A. Abroyan, A. N. Andronov, and A. I. Titov, Physical Foundations of Electron and Ion Technology [in Russian], Vysshaya Shkola, Moscow (1984).Google Scholar
  12. 12.
    H. Ryssel and I. Ruge, Ion Implantation Wiley, New York (1986).Google Scholar
  13. 13.
    A. N. Didenko, É. V. Kozlov, Yu. P. Sharkeev, and A. S. Sulakshin, Dokl. Russ. Akad. Nauk,26 (1993).Google Scholar
  14. 14.
    I. P. Chernov, A. P. Mamontov, and A. A. Botaki, At. Énerg.,57, 56 (1984).Google Scholar
  15. 15.
    J. M. Poutt, G. Foti, and D. C. Jacobson, Surface Modification and Doping by Laser, Ion, and Electron Beams [Russian translation], Mashinostroenie, Moscow (1987).Google Scholar
  16. 16.
    Yu. F. Bykovskii, V. N. Nevolin, and V. Yu. Fominskii, Ion and Implantation of Metallic Materials [in Russian], Énergoatomizdat, Moscow (1991).Google Scholar
  17. 17.
    S. D. Grishin, L. N. Leskov, and N. P. Kozlov, Plasma Accelerators [in Russian], Mashinostroenie, Moscow (1983).Google Scholar
  18. 18.
    V. I. Pol'skii, B. A. Kalin, P. I. Kartsev, et al., At. Énerg.,57, No. 2, 83 (1984).Google Scholar
  19. 19.
    B. A. Kalin, V. I. Pol'skii, and V. L. Yakushin, Abstracts of Papers Read at the First All-Union Conference on Charged-Particle Beam Modification of Properties of Structural Materials, Part 1 [in Russian], Tomsk (1988), pp. 100–102.Google Scholar
  20. 20.
    G. P. Bazhenov, S. P. Bugaev, G. P. Erokhin, et al., Abstracts of Papers Read at the Sixth All-Union Symposium on High-Current Electronics. Vol. 2 [in Russian], ISÉ SO AN SSSR (Institute of High-Current Electronics, Siberian Branch of the Academy of Sciences of the USSR), Tomsk (1984), pp. 93–95.Google Scholar
  21. 21.
    I. G. Brown, Appl. Phys. Lett.,47, No. 4, 358 (1985).Google Scholar
  22. 22.
    N. M. Arbuzov, G. P. Isaev, and A. I. Ryabchikov, Abstracts of Papers Read at the Sixth All-Union Symposium on High-Current Electronics. Vol. 2 [in Russian], ISÉ SO AN SSSR (Institute of High-Current Electronics, Siberian Branch of the Academy of Sciences of the USSR), Tomsk (1986) pp. 184–186.Google Scholar
  23. 23.
    S. P. Bugaev, E. M. Oks, P. M. Shchanin, et al., Prib. Tekh Éksp.,6, 125 (1990).Google Scholar
  24. 24.
    G. P. Bazhenov, S. P. Bugaev, V. L. Brankin, et al., Abstracts of Papers Read at the Sixth All-Union Symposium on High-Current Electronics. Part 2 [in Russian], ISÉ SO AN SSSR (Institute of High-Current Electronics, Siberian Branch, Academy of Sciences of the USSR), Tomsk (1984), pp. 133–134.Google Scholar
  25. 25.
    Yu. P. Kolobov, A. D. Korotaev, and A. O. Savchenko, Abstracts of Papers Read at the Second All-Union Conference on Charged-Particle Beam Modification of Properties of Structural Materials, Part 3 [in Russian], Sverdlovsk (1991), pp. 77–79.Google Scholar
  26. 26.
    V. P. Sergeev, V. P. Yanovskii, Yu. P. Sharkeev, et al., Abstracts of Papers Read at the Sixth All-Union Symposium on High-Current Electronics, Siberian Branch, Academy of Sciences of the USSR), Tomsk (1984), pp. 99–111.Google Scholar
  27. 27.
    I. G. Brown, Light Metal Age,44, No. 9/10, 5 (1986).Google Scholar
  28. 28.
    A. I. Ryabchikov, R. A. Nasyrov, V. A. Shulov, et al., Abstracts of Papers Read at All-Union Conference of the Interaction of Atomic Particles with a Solit [in Russian], MIFI (Moscow Institute of Engineering Physics), Moscow (1989), pp. 109–111.Google Scholar
  29. 29.
    J. Sasaki and I. G. Brown, Rev. Sci. Instrum.,61, No. 1, 586 (1990).Google Scholar
  30. 30.
    N. M. Arbuzov, V. A. Vaulin, and A. I. Ryabchikov, Inventor's Certificate 1395024 SSSR, Application April 7, 1986; Byull. Izobret., No. 36 (1990).Google Scholar
  31. 31.
    A. I. Ryabchikov, Rev. Sci. Instrum.,61, No. 1, 641 (1990).Google Scholar
  32. 32.
    I. G. Brown in: The Physics and Technology of Ion Sources, I. G. Brown (ed.), Wiley, New York (1989), p. 331.Google Scholar
  33. 33.
    N. M. Arbuzov, S. V. Dektyarev, and A. I. Ryabchikov, Prib. Tekh Éksp., No. 1, 171 (1991).Google Scholar
  34. 34.
    A. I. Ryabchikov, N. M. Arbuzov, and R. A. Nasyrov, Zh. Tekh. Fiz.,60, No. 5, 106 (1990).Google Scholar
  35. 35.
    A. I. Ryabchikov, and N. M. Nasyrov, Rev. Sci. Instrum.,63, No. 1, 2428 (1992).Google Scholar
  36. 36.
    A. I. Ryabchikov and I. G. Brown, Eighth International Conference on Surface Modification of Metals by Ion Beams. Abstracts, Kanazawa, Japan (1993), p. 54.Google Scholar
  37. 37.
    I. G. Brown and X. Godechot, IEEE Trans. Plasma Sci.,19, No. 5, 713 (1991).Google Scholar
  38. 38.
    J. A. Knapp, D. M. Follstaedt, and B. L. Doyle, Appl. Phys. Lett.,45, No. 5, 529 (1984).Google Scholar
  39. 39.
    I. Liu and J. Meyer, in: Ion Implantation in Semiconductors and Other Materials. A Collection of Articles [Russian translation], No. 10, pp. 236–253 (1980).Google Scholar
  40. 40.
    N. M. Arbuzov, V. A. Vaulin, A. I. Ryabchikov, et al., Inventor's Certificate 1412517 SSSR, Application March 26, 1986; Byull. Izobret., No. 33 (1990).Google Scholar
  41. 41.
    A. I. Ryabchikov and R. A. Nasyrov, Proceedings of the International Conference on Implantation and Ion Beam Equipment, Elenite, Bulgaria (1990), pp. 377–382.Google Scholar
  42. 42.
    A. I. Ryabchikov and R. A. Nasyrov, Poverkhnost',3, 98 (1992).Google Scholar
  43. 43.
    A. I. Ryabchikov and R. A. Nasyrov, Nucl. Instrum. Method,B61, 48 (1991).Google Scholar
  44. 44.
    S. I. Zhukova, R. A. Nasyrov, and A. I. Ryabchikov, Abstracts of Papers Read at All-Union Conference on Ion-Beam Modification of Materials [in Russian], Kaunas (1989), p. 105.Google Scholar
  45. 45.
    A. I. Ryabchikov and R. A. Nasyrov, Poverkhnost', No.3, 98 (1992).Google Scholar
  46. 46.
    A. I. Ryabchikov, R. A. Nasyrov, G. I. Schachtmaister, et al., Proceedings of the International Conference of Implantation and Ion Beam Equipment, Elenite, Bulgaria (1990), pp. 327–332.Google Scholar
  47. 47.
    A. I. Ryabchikov, E. I. Lukonin, and D. A. Karpov, Abstracts of Papers Read at a Symposium on High-Current 3 [in Russian], Ekaterinburg (1992), pp. 86–88.Google Scholar
  48. 48.
    J. R. Conrad, J. Appl. Phys.,62, 777 (1987).Google Scholar
  49. 49.
    J. R. Conrad, J. L. Radtke, and R. A. Dodd, J. Appl.,62, 4591 (1987).Google Scholar
  50. 50.
    J. Tendys, I. J. Donnelly, M. J. Kenny, and J. T. A. Pollock, Appl. Phys., Lett.,53, 2143 (1988).Google Scholar
  51. 51.
    E. N. Mastyukov, A. V. Mishanova, V. I. Khvesyuk, et al., Abstracts of Papers Read at the Second All-Union Conference Charged-Particle Beam Modification of Properties of Structural Materials. Vol. 1 [in Russian], Sverdlovsk (1991), pp. 22–24.Google Scholar
  52. 52.
    A. I. Ryabchikov, I. V. Stepanov, S. U. Dektjarev, et al., Fifth International Conference on Ion Sources: Abstracts, Beijing, China (1993), p. 44.Google Scholar
  53. 53.
    F. F. Komarov and A. P. Novikov, Itogi Nauki Tekh. Ser. Fiz. Osnovy Lazernoi Puchkovoi Tekhnol., Vol. 5, 113, VINITI (All-Union Institute of Scientific and Technical Information), Moscow (1989), p. 113.Google Scholar
  54. 54.
    V. L. Kutuzov, M. Yu. Ovsyannikov, et al., Phys. Status Solidi A,112, 361 (1989).Google Scholar

Copyright information

© Plenum Publishing Corporation 1994

Authors and Affiliations

  • A. I. Ryabchikov

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