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Journal of Materials Science

, Volume 5, Issue 11, pp 978–982 | Cite as

Thin films of semiconductors and dielectrics produced by laser evaporation

  • V. S. Ban
  • D. A. Kramer
Papers

Abstract

Thin films of several III–V and II–VI compounds as well as of some dielectrics have been vacuum-deposited using a focused beam of a CO2 or ruby laser to evaporate these materials. The crystallinity, morphology and the chemical composition of the produced thin films have been examined by various analytical methods. Films produced by the ruby laser were in most cases polycrystalline and stoichiometric, while films produced by the CO2 laser were amorphous and non-stoichiometric. Different mechanisms of evaporation leading to the observed differences in characteristics of thin films are discussed.

Keywords

Polymer Thin Film Evaporation Ruby Laser Evaporation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman and Hall Ltd. 1970

Authors and Affiliations

  • V. S. Ban
    • 1
  • D. A. Kramer
    • 1
  1. 1.RCA LaboratoriesPrincetonUSA

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