Abstract
The refractive indices of titania/silica sol-gel films are known to vary over a wide range with composition. However, little work has been done to investigate the possible variations in refractive index that can be produced for one specific sol-gel composition by varying the heat-treatment time and temperature. In this study, three different titania/silica sol-gel compositions containing 40, 60 and 80 mol% titania were studied after thermal processing at temperatures from 175–1050°C for variable lengths of time. The refractive indices and thicknesses of the sol-gel films spin-coated on to silicon wafers were determined using a combined technique of ellipsometry and reflectance spectroscopy. The microstructural differences in the films were investigated using X-ray diffraction and transmission electron microscopy techniques.
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Melpolder, S.M., West, A.W., Barnes, C.L. et al. Phase transformations in TiO2/SiO2 sol-gel films as a function of composition and heat-treatment. J Mater Sci 26, 3585–3592 (1991). https://doi.org/10.1007/BF00557148
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DOI: https://doi.org/10.1007/BF00557148