Summary
A new chemically amplified polymeric imaging system based on polymers containingt-butylmalonate pendant groups has been demonstrated. Both the homopolymer of di-t-butyl (vinylbenzyl)benzylmalonate and its copolymer with styrene have been tested in coatings containing a photoacid generator. Imaging experiments confirm that the materials have very high sensitivities when exposed to UV radiation near 250nm.
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Havard, J.M., Fréchet, J.M.J. Novel chemically amplified imaging materials containing malonate pendant groups. Polymer Bulletin 37, 475–482 (1996). https://doi.org/10.1007/BF00556808
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DOI: https://doi.org/10.1007/BF00556808