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The rate of deposition and the morphology of zinc oxide deposited from Zn(v)/CO/CO2/Ar gas mixtures

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Abstract

Zinc oxide has been deposited onto a silica substrate from a Zn (v)/CO/C02/Ar gas mixture and the rates of deposition are presented as a function of temperature and gas composition. The morphology of the oxide deposits is described in detail.

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References

  1. M. F. Lewis, “Modem Oxide Materials”, edited by B. Cockayne and D. W. Jones (Academic Press, London 1972).

    Google Scholar 

  2. M. Ohnishi, M. Yoshizawa andI. Sumiaki,Japan J. Appl. Phys. 9 (1970) 412.

    Google Scholar 

  3. S. W. K. Morgan andS. E. Woods,Metals Mater. (1971) Metallurgical Review 156.

  4. A. Reisman, M. Berkenblit, R. Ghez andS. A. Chan,J. Electron. Mater. 1 (1972) 395.

    Google Scholar 

  5. J. V. Stott andD. J. Fray, “Advances in Extive Metallurgy”, edited by M. J. Jones (I.M.M., London, 1972).

    Google Scholar 

  6. J. A. Clarke andD. J. Fray, Institution of Chemical Engineers Symposium Series No. 43, (Institution of Chemical Engineering, London, 1975).

    Google Scholar 

  7. Y. Kubokawa,Bull. Chem. Soc. Japan 33 (1960) 555.

    Google Scholar 

  8. E. T. Turkdogan andJ. V. Vinters,Carbon 8 (1970) 39.

    Google Scholar 

  9. G. Heil andP. Kunstmann,Surface Sci. 13 (1969) 72.

    Google Scholar 

  10. A. Klein,Z. Physik 188 (1965) 352.

    Google Scholar 

  11. J. Mc K. Nobbs andF. G. Gillespie,J. Phys. Chem. Solids 31 (1970) 2353.

    Google Scholar 

  12. R. A. Radadonov, S. A. Semiletov andZ. A. Magomedov,Soviet Phys., Solid State 12 (1970) 1124.

    Google Scholar 

  13. G. A. Rozgonyi andW. J. Polito,Appl. Phys. Lett. 8 (1966) 220.

    Google Scholar 

  14. Idem, J. Vac. Sci. Technol. 6 (1969) 115.

    Google Scholar 

  15. E. Bauer, “Single Crystal Films”, edited by Francombe and Sato (Pergamon, Oxford, 1964).

    Google Scholar 

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Clarke, J.A., Fray, D.J. The rate of deposition and the morphology of zinc oxide deposited from Zn(v)/CO/CO2/Ar gas mixtures. J Mater Sci 13, 1921–1925 (1978). https://doi.org/10.1007/BF00552898

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  • DOI: https://doi.org/10.1007/BF00552898

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