Journal of Materials Science

, Volume 15, Issue 4, pp 895–902 | Cite as

Observation of residual stress and defects in silicon induced by scribing

  • Hidenori Kotake
  • Shin Ichiro Takasu
Papers

Abstract

Residual stresses induced by three scribing methods, diamond point scriber, laser scriber and diamond blade saw, are studied quantitatively by infra-red photoelasticity. It is clear that diamond blade saw scribing is most desirable, for residual stress induced by it is several times smaller than the stress caused by the other methods. The stress gradient differs between the laser scribed sample and the others, probably because of the difference in stress generation mechanism. Removing the damaged layer by etching reduces residual stress. The three scribing methods are also studied by the observation of defects after annealing and the results are compared with those determined by photoelastic measurement.

Keywords

Polymer Silicon Residual Stress Generation Mechanism Stress Generation 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    Shin, Takasu and Y. Matsushita, J. Jap. Appl. Phys. 44 Suppl. (1975) 259.Google Scholar
  2. 2.
    S. R. Lederhandler, J. Appl. Phys. 30 (1959) 1631.Google Scholar
  3. 3.
    Shin, Takasu, “Crystal Growth and Characterization”, edited by R. Ueda and J. R. Mullin, (North-Holland, 1975) p. 317.Google Scholar
  4. 4.
    Shin, Takasu et al., in “Semiconductor Silicon 1977”, edited by H. R. Huff and E. Sirtle (Electrochemical Society, Princeton, N.J., 1977) p. 456.Google Scholar
  5. 5.
    H. Kotake and Shin, Takasu, J. Electrochem. Soc. 127 (1980) 179.Google Scholar
  6. 6.
    A. A. Giardini, Amer. Mineral. 43 (1958) 249.Google Scholar
  7. 7.
    S. Yasuami, J. Electrochem. Soc., to be published.Google Scholar

Copyright information

© Chapman and Hall Ltd 1980

Authors and Affiliations

  • Hidenori Kotake
    • 1
  • Shin Ichiro Takasu
    • 1
  1. 1.Toshiba Research and Development CentreSaiwai-kuJapan

Personalised recommendations