Abstract
The intrinsic force per unit width, S, in thin films of Ag, Al, ZnS and LiF prepared by vacuum evaporation at pressures of less than 5×10−5 Torr, has been investigated using a sensitive bending plate technique with capacitative detection. In each case the intrinsic force S was found to vary linearly with film thickness f, for thicknesses greater than about 100 Å, leading to a constant intrinsic stress σ=dS/df. Both S and σ were found to be compressive for ZnS and Al, and tensile for Ag and LiF.
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Laugier, M. Intrinsic stress in thin films of Ag, Al, ZnS and LiF. J Mater Sci 15, 1147–1152 (1980). https://doi.org/10.1007/BF00551803
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DOI: https://doi.org/10.1007/BF00551803