Journal of Materials Science

, Volume 21, Issue 8, pp 2863–2865 | Cite as

Electrical and optical properties of annealed gallium arsenide thin films on glass substrates

  • M. N. Islam
  • S. K. Mitra
Papers

Abstract

The effects of annealing in vacuum on the electrical and optical properties of GaAs thin films deposited by the flash evaporation method were studied. Thin films of compound GaAs deposited upon glass substrates at room temperature were annealed in a vacuum of 2×10−6 torr at different temperatures up to 350° C. The properties of the films depended strongly on annealing temperature. The lowest resistivity measured was about 1.6 × 104 Ωcm at an annealing temperature of about 240° C. The activation energy of as-deposited and annealed films were measured and compared. Optical absorption measurements of the asdeposited samples and the samples annealed at a temperature of 240° C were made as a function of photon energy.

Keywords

Thin Film Activation Energy GaAs Optical Property Gallium 

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References

  1. 1.
    L. Harris and B. M. Siegel, J. Appl. Phys. 19 (1948) 739.Google Scholar
  2. 2.
    J. L. Richards, P. B. Hart and L. M. Gallone, ibid. 34 (1963) 3418.Google Scholar
  3. 3.
    E. K. Muller, ibid. 35 (1964) 580.Google Scholar
  4. 4.
    T. B. Light, E. M. Hull and R. Goroth, J. Electrochem. Soc. 115 (1968) 857.Google Scholar
  5. 5.
    T. Pankey and J. E. Davey, J. Appl. Phys. 37 (1966) 1507.Google Scholar
  6. 6.
    L. J. Van Der Pauw, Philips Res. Rep. 13 (1958) 1.Google Scholar
  7. 7.
    S. Tolansky, in “Multiple Beam Interferometry of Surfaces and Films” (Oxford University Press, London, 1948) p. 147.Google Scholar
  8. 8.
    Y. Segui, F. Carrere and A. Bui, Thin Solid Films 92 (1982) 303.Google Scholar
  9. 9.
    K. Kumabe and N. Matsumoto, Jpn J. Appl. Phys. 18 (1979) 1789.Google Scholar
  10. 10.
    A. Yamashita, T. Tuzuki, T. Yamada and I. Yamauchi, J. Appl. Phys. 38 (1967) 2359.Google Scholar
  11. 11.
    J. E. Davey and T. Pankey, ibid. 35 (1964) 2203.Google Scholar
  12. 12.
    N. Matsumoto and K. Kumabe, Jpn J. Appl. Phys. 19 (1980) 1583.Google Scholar
  13. 13.
    R. H. Bube, J. Appl. Phys. 31 (1960) 315.Google Scholar
  14. 14.
    M. D. Sturge, Phys. Rev. 127 (1962) 768.Google Scholar

Copyright information

© Chapman and Hall Ltd. 1986

Authors and Affiliations

  • M. N. Islam
    • 1
  • S. K. Mitra
    • 1
  1. 1.Department of Applied Physics and ElectronicsUniversity of RajshahiBangladesh

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