Journal of Materials Science

, Volume 14, Issue 4, pp 1007–1008 | Cite as

The effects of hydrogen on the nitridation of silicon

  • D. Campos-Loriz
  • F. L. Riley


Hydrogen Polymer Silicon 
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Copyright information

© Chapman and Hall Ltd. 1979

Authors and Affiliations

  • D. Campos-Loriz
    • 1
  • F. L. Riley
    • 1
  1. 1.Department of Ceramics, Houldsworth School of Applied ScienceThe University of LeedsLeedsUK

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