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The effects of hydrogen on the nitridation of silicon

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References

  1. W. M. Dawson and A. J. Moulson, J. Mater. Sci. 13 (1978) 2289.

    Google Scholar 

  2. P. Popper and S. N. Ruddlesden, Trans. Brit. Ceram. Soc. 61 (1960) 603.

    Google Scholar 

  3. N. L. Parr, R. Sands, P. L. Pratt, E. R. W. May, C. R. Shakespeare and D. S. Thompson, Powder Met. 8 (1961) 152.

    Google Scholar 

  4. A. Atkinson and A. J. Moulson, “Science of Ceramics”, Vol. 8 (Brit. Ceram. Soc, 1976) p. 111.

  5. D. Campos-Loriz and F. L. Riley, ibid, Vol. 9, (Ned. Keram. Vereniging 1977) p. 38.

  6. Idem, J. Mater. Sci. 13 (1978) 1125.

    Google Scholar 

  7. S. M. Boyer and A. J. Moulson, ibid, 13 (1978) 1637.

    Google Scholar 

  8. C. Wagner, j. Appl. Phys. 29, (1958) 1295.

    Google Scholar 

  9. S. M. Boyer, D. Sang and A. J. Moulson, “Nitrogen Ceramics” NATO Advanced Study Institutes Applied Science Series No. 23, edited by F. L. Riley (Noordhoff, Leyden, 1977) p. 297.

    Google Scholar 

  10. H. Dervisbegovic and F. L. Riley, unpublished work.

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Authors and Affiliations

  1. Department of Ceramics, Houldsworth School of Applied Science, The University of Leeds, Leeds, UK

    D. Campos-Loriz & F. L. Riley

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  1. D. Campos-Loriz
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  2. F. L. Riley
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Campos-Loriz, D., Riley, F.L. The effects of hydrogen on the nitridation of silicon. J Mater Sci 14, 1007–1008 (1979). https://doi.org/10.1007/BF00550738

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  • DOI: https://doi.org/10.1007/BF00550738

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