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Identification of copper precipitation in single crystal silicon using the CAMECA Ion Analyser

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References

  1. W. C. Dash, Phys. Rev. 98 (1955) 1536.

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  2. J.-M. Rouberol, J. Guernet, P. Deschamps, J.-P. Dagnot, and J. M. Guyon De La Berge, Proceedings of the Vth International Congress on X-ray Optics and Micro-analysis, Tübingen, 1968, p. 311. Eds. Mollenstedt and Gaukler (Springer-Verlag, Berlin-Heidelberg, 1969).

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  3. C. K. Jackson, unpublished. See. C. A. Anderson, Int. J. Mass Spectrometry and Ion Physics 3 (1970) 413 for reference to negative ion emission under Cs+ ion bombardment.

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Authors and Affiliations

  1. Materials Development Division, AERE, Harwell, UK

    D. M. Poole

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  1. D. M. Poole
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Poole, D.M. Identification of copper precipitation in single crystal silicon using the CAMECA Ion Analyser. J Mater Sci 7, 1348–1349 (1972). https://doi.org/10.1007/BF00550705

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  • DOI: https://doi.org/10.1007/BF00550705

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