Journal of Materials Science

, Volume 7, Issue 9, pp 1080–1083 | Cite as

Influence of impurity adsorption on the properties of silicon single crystal layers

  • T. Kormány
  • G. Kósza
Letters

Keywords

Polymer Silicon Silicon Single Crystal Crystal Layer Impurity Adsorption 

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References

  1. 1.
    S. Yoshioka and S. Takaganagi, Jap. J. Appl. Phys. 4 (1965) 628.Google Scholar
  2. 2.
    J. Gyulai, J. W. Mayer, and I. V. Mitchel, Proceedings of the International Conference on the Phys. and Chem. of Semiconductor Heterojunctions, Budapest, 1970, Vol. 5, p. 293.Google Scholar
  3. 3.
    A. J. Van Bommel and F. Meyer, Surface Sci. 8 (1967) 467.Google Scholar
  4. 4.
    E. Bauer, Phys. Letts. A26 (1968) 530.Google Scholar
  5. 5.
    R. M. Broudy and H. C. Abbink, Appl. Phys. Letts, 13 (1968) 212.Google Scholar
  6. 6.
    E. R. Shaw and K. M. Busen, J. Electrochem. Soc. 114 (1967) 872.Google Scholar
  7. 7.
    E. Biederman, ibid 114 (1967) 207.Google Scholar
  8. 8.
    D. V. Sulway, P. H. Thornton, and M. J. Turner, Solid State Electronics 11 (1968) 567.Google Scholar
  9. 9.
    T. Kormány, L. Vecsernyés, M. Vértesy, and E. Jutasi, Third International Symposium Reinstroffe in Wissenschaft und Technik, 1970 Dresden, Kristall und Technik, 6 (1971) 297.Google Scholar
  10. 10.
    E. Mendel, SCP and Solid State Techn. 10 (1967) 27.Google Scholar
  11. 11.
    R. Lieberman and D. L. Klein, J. Electrochem. Soc. 113 (1965) 1956.Google Scholar
  12. 12.
    L. Vecsernyés, Z. Anal. Chem. 239 (1968) 294.Google Scholar
  13. 13.
    L. Nagy and M. Vértesy, TKI-Közlemények 14 (1969) 107.Google Scholar

Copyright information

© Chapman and Hall Ltd. 1972

Authors and Affiliations

  • T. Kormány
    • 1
  • G. Kósza
    • 1
  1. 1.Research Institute for TelecommunicationsBudapest 11Hungary

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