Abstract
The SHEED technique enables direct and rapid quantitative measurement of energyfiltered electron-diffraction intensities to be made. it may be used for structural studies of single crystals, polycrystalline films and amorphous materials. These may be examined in transmission if sufficiently thin or, otherwise, by reflection electron diffraction. In addition to conventional passive observation, structural studies of growing thin and thick films may be made during deposition. Work on all these topics is reviewed and the advantages of SHEED in each case clearly demonstrated.
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Tompsett, M.F. Review: Scanning high-energy electron diffraction (SHEED) in materials science. J Mater Sci 7, 1069–1079 (1972). https://doi.org/10.1007/BF00550071
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DOI: https://doi.org/10.1007/BF00550071