Journal of Materials Science

, Volume 7, Issue 9, pp 1069–1079 | Cite as

Review: Scanning high-energy electron diffraction (SHEED) in materials science

  • M. F. Tompsett
Article

Abstract

The SHEED technique enables direct and rapid quantitative measurement of energyfiltered electron-diffraction intensities to be made. it may be used for structural studies of single crystals, polycrystalline films and amorphous materials. These may be examined in transmission if sufficiently thin or, otherwise, by reflection electron diffraction. In addition to conventional passive observation, structural studies of growing thin and thick films may be made during deposition. Work on all these topics is reviewed and the advantages of SHEED in each case clearly demonstrated.

Keywords

Polymer Reflection Quantitative Measurement Electron Diffraction Material Science 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    C. W. B. Grigson, “Studies of Polycrystalline Films by Electron Beams”, Advances in Electronics and Electron Physics, Suppl. 4; “Electron Beam and Laser Beam Technology”, Ed. L. Marton and A. B. El Kareh (Academic Press, New York and London, 1969).Google Scholar
  2. 2.
    C.W.B. Grigson and P. I. Tillett, Int. J. Electron, 24 (1968) 101.Google Scholar
  3. 3.
    M. F. Tompsett, D. E. Sedgewick, and J. St. Noble, J. Sci. Instrum. (J. Phys. E.) Series 2, 2 (1969) 587.Google Scholar
  4. 4.
    M. B. Heritage, “Growth Studies on Thin Films Using Scanning Electron Diffraction”, Univ. of Cambridge Ph.D. Diss., 1968.Google Scholar
  5. 5.
    M. F. Tompsett and C. W. B. Grigson, Nature, 206 (1965) 923.Google Scholar
  6. 6.
    G. R. Bradbury, J. Appl. Cryst. 2 (1969) 254.Google Scholar
  7. 7.
    J. F. Graczyk and S. C. Moss, Rev. Sci. Iustrum. 40 (1969) 424.Google Scholar
  8. 8.
    A.E.I. Ltd. (Harlow, England).Google Scholar
  9. 9.
    R. J. Holmes, I. E. Pollard, and C. J. Ryan, J. Appl. Cryst. 3 (1970) 200.Google Scholar
  10. 10.
    Vacuum Generators Ltd, Charlwoods Road, East Grinstead, Sussex, England. Marketed in the USA by Veeco, Inc.Google Scholar
  11. 11.
    C. W. B. Grigson and P. I. Tillett, Nature 215 (1967) 617.Google Scholar
  12. 12.
    C. W. B. Grigson and M. F. Tompsett, Nature 210 (1966) 86.Google Scholar
  13. 13.
    D. B. Dove, M. B. Heritage, K. L. Chopra, and S. K. Bahl, Appl. Phys. Letters 16 (1970) 138.Google Scholar
  14. 14.
    P. I. Tillett and M. B. Heritage, J. Phys. D: Appl. Phys. 4 (1971) 773.Google Scholar
  15. 15.
    P. I. Tillett, “Scanning Electron Diffraction at Cryogenic Temperatures”, Univ. of Cambridge, Ph.D Diss. 1969.Google Scholar
  16. 16.
    C. W. B. Grigson and D. B. Dove, J. Vac. Sci. and Tech. 3 (1966) 120.Google Scholar
  17. 17.
    P. N. Denbigh and R. B. Marcus, J. Appl. Phys. 37 (1966) 4325.Google Scholar
  18. 18.
    P. N. Denbigh and D. B. Dove, J. Appl. Phys. 38 (1967) 99.Google Scholar
  19. 19.
    M. F. Tompsett, M. B. Heritage, and C. W. B. Grigson, Nature 215 (1967) 498.Google Scholar
  20. 20.
    M. F. Tompsett, “Reflection Scanning Electron Diffraction”, Univ. of Cambridge Ph.D. Diss. 1966.Google Scholar
  21. 21.
    M. B. Heritage and M. F. Tompsett, J. Appl. Phys. 41 (1970) 407.Google Scholar
  22. 22.
    M. F. Tompsett and J. St. Noble, Thin Solid Films 5 (1970) 81.Google Scholar

Copyright information

© Chapman and Hall Ltd. 1972

Authors and Affiliations

  • M. F. Tompsett
    • 1
  1. 1.Bell Telephone Laboratories IncMurray HillUSA

Personalised recommendations