Journal of Materials Science

, Volume 7, Issue 9, pp 1069–1079 | Cite as

Review: Scanning high-energy electron diffraction (SHEED) in materials science

  • M. F. Tompsett


The SHEED technique enables direct and rapid quantitative measurement of energyfiltered electron-diffraction intensities to be made. it may be used for structural studies of single crystals, polycrystalline films and amorphous materials. These may be examined in transmission if sufficiently thin or, otherwise, by reflection electron diffraction. In addition to conventional passive observation, structural studies of growing thin and thick films may be made during deposition. Work on all these topics is reviewed and the advantages of SHEED in each case clearly demonstrated.


Polymer Reflection Quantitative Measurement Electron Diffraction Material Science 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Chapman and Hall Ltd. 1972

Authors and Affiliations

  • M. F. Tompsett
    • 1
  1. 1.Bell Telephone Laboratories IncMurray HillUSA

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