Abstract
Slices of p-type germanium, cut parallel to the (111) plane, have been successfully polished by anodic dissolution. The slices were hydrodynamically floated on a viscous electrolyte layer which covered a rapidly rotating cathode. The effect of changing the electrolyte composition and concentration on the current-voltage characteristics and on the final surface finish have been investigated. Under the best conditions, 100 μm of germanium can be removed from the surface, thereby removing all the previous work damage, while retaining the flatness of the surface to better than 1 μm/cm, and leaving a highly polished surface with an average surface roughness of ±100 Å.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
T. M. Buck in “The Surface Chemistry of Metals and Semiconductors”, edited by H. C. Gatos (Wiley, New York, 1960), pp. 107 to 135.
M. V. Sullivan, D. L. Klein, R. M. Finne, L. A. Pompliano, and G. A. Kolb, J. Electrochem. Soc. 110 (1963) 412.
A. F. Bogenschütz, Telefunken-Zeitung 36 (1963) 151.
D. Baker and J. R. Tillman, Solid State Electronics 6 (1963) 589.
P. A. Jacquet, Metal. Rev. 1 (1956) 157.
W. C. Elmore, J. Appl. Phys. 11 (1940) 797.
J. Edwards, J. Electrochem. Soc. 100 (1953) 223C.
C. Wagner, ibid, 101 (1954) 225.
T. M. Donovan and B. O. Seraphin, ibid, 09 (1962) 877.
D. A. Everest and J. C. Harrison, J. Chem. Soc. (1957) 4319.
D. Baker and H. Yemm, Brit. J. Appl. Phys. 8 (1957) 302.
M. M. Faktor, private communication.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Fiddyment, D.G., Newns, G.R. The anodic polishing of germanium. J Mater Sci 1, 403–408 (1966). https://doi.org/10.1007/BF00549940
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF00549940