Journal of Materials Science

, Volume 7, Issue 6, pp 687–693 | Cite as

Development of the surface topography on silica glass due to ion-bombardment

  • I. S. T. Tsong
  • D. J. Barber
Papers

Abstract

Mechanically polished fused silica surfaces have been bombarded by energetic Ar+ ions and the development of surface topography examined by scanning electron microscopy and by transmission electron microscopy of direct carbon replicas in order to study the parameters affecting the surface finish such as charging, angle of ion incidence and rotation of the specimen, A theory based on a simple model of initial surface unevenness on a microscopic scale is proposed to explain the observed surface features due to ion-bombardment.

Keywords

Polymer Microscopy Electron Microscopy Scanning Electron Microscopy Transmission Electron Microscopy 

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References

  1. 1.
    D. J. Barber, J. Mater. Sci. 5 (1970) 1.Google Scholar
  2. 2.
    M. Paulus and F. Reverchon, “Le Bombardment Ionique” (C.N.R.S., France, 1962) p. 223.Google Scholar
  3. 3.
    I. S. T. Tsong, Phys. Stat. Sol. (a) 7 (1971) 451.Google Scholar
  4. 4.
    L. Holland, R. E. Hurley, and L. Laurenson, J. Phys. E. (Sci. Instrum.) 4 (1971) 198.Google Scholar
  5. 5.
    C. G. Crockett, to be published.Google Scholar
  6. 6.
    R. K. Fitch, T. Mulvey, W. J. Thatcher, and A. H. Mcilraith, J. Phys. D. (Appl. Phys.) 3 (1970) 1399.Google Scholar
  7. 7.
    H. Bach, J. Non-Crystalline Solids 3 (1970) 1.Google Scholar
  8. 8.
    A. D. G. Stewart and M. W. Thompson, J. Mater. Sci. 4 (1969) 56.Google Scholar
  9. 9.
    W. Primak and J. Luthra, J. Appl. Phys. 37 (1966) 2287.Google Scholar
  10. 10.
    G. K. Wehner and D. J. Hajicek, ibid 42 (1971) 1145.Google Scholar
  11. 11.
    M. J. Nobes, J. S. Colligon, and G. Carter, J. Mater. Sci. 4 (1969) 730.Google Scholar
  12. 12.
    G. Carter, J. S. Colligon, and M. J. Nobes, ibid 6 (1971) 115.Google Scholar

Copyright information

© Chapman and Hall Ltd. 1972

Authors and Affiliations

  • I. S. T. Tsong
    • 1
  • D. J. Barber
    • 1
  1. 1.Department of PhysicsUniversity of EssexColchesterUK

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