Skip to main content
Log in

Plasma deposition and Auger studies of carbon impurities in zinc oxide

  • Papers
  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

A low pressure radio-frequency discharge in methane or a methane-oxygen mixture is used to deposit carbon species on the surface of compacted ZnO powder at 400° C. The carbon composition of the treated samples is examined in a separate Auger spectrometer system as the samples are heated in vacuum to 400° C, exposed at 400° C to oxygen, reannealed at the same temperature and subjected to argon ion bombardment. Evidence is presented that in the case of ZnO treated in methane-oxygen discharges, volume incorporation of carbon occurs and that this carbon moves to the surface of the sample in the course of subsequent vacuum heat treatment.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. D. J. Miller and D. Haneman, Surf. Sci. 19 (1970) 45.

    Google Scholar 

  2. Idem, ibid. 24 (1972) 639.

    Google Scholar 

  3. M. Mintas and G. W. Filby, Z. Naturforsch. 86a (1981) 140.

    Google Scholar 

  4. Y. Shapira, S. M. Cox and D. Lichtman, Surf. Sci. 54 (1976) 43.

    Google Scholar 

  5. Y. Shapira, R. B. McQuistan and D. Lichtman, Phys. Rev. B 15 (1977) 2163.

    Google Scholar 

  6. L. Holland, J. Vac. Sci. Technol. 14 (1977) 5.

    Google Scholar 

  7. F. K. McTaggart, “Plasma Chemistry in Electrical Discharges” (Elsevier, Amsterdam, London, New York, 1967).

    Google Scholar 

  8. W. Jost, “Diffusion in Solids, Liquids, Gases” (Academic Press, New York, 1960) p. 25.

    Google Scholar 

  9. D. G. Thomas, J. Phys. Chem. Solids 3 (1957) 229.

    Google Scholar 

  10. D. G. Thomas and J. J. Lander, J. Chem. Phys. 25 (1956) 1136.

    Google Scholar 

  11. M. Nagao, K. Morishige, T. Takeshita and T. Morimoto, Bull. Chem. Soc. Jpn 47 (1974) 2107

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Cope, J.O., Lynch, D.F. Plasma deposition and Auger studies of carbon impurities in zinc oxide. J Mater Sci 18, 3331–3336 (1983). https://doi.org/10.1007/BF00544158

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00544158

Keywords

Navigation