Journal of Materials Science

, Volume 26, Issue 16, pp 4318–4322 | Cite as

Preparation, composition and some properties of codeposited TiB2-TiC x -coatings

  • K. Bartsch
  • A. Leonhardt
  • E. Wolf
  • M. Schönherr
Papers

Abstract

Heterogeneous TiCx and TiB2 containing layers have been deposited from the gas phase onto hard metal and tantalum substrates in a cold wall reactor. The process parameters were thermodynamically calculated and verified by experiments. The deposited layers have been characterized regarding the chemical composition, structure, microhardness and abrasion wear. In a large composition range a characteristic layer structure is observed. Microhardness and abrasion wear run in dependence on the layer composition through a peak factor.

Keywords

Polymer Layer Structure Tantalum Composition Range Abrasion Wear 

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Copyright information

© Chapman & Hall 1991

Authors and Affiliations

  • K. Bartsch
    • 1
  • A. Leonhardt
    • 1
  • E. Wolf
    • 1
  • M. Schönherr
    • 1
  1. 1.Central Institute of Solid State Physics and Material ScienceDresdenFRG

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