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The combined effects of Fe and H2 on the kinetics of silicon nitridation

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Authors and Affiliations

  1. Department of Ceramics, Houldsworth School of Applied Science, University of Leeds, Leeds, UK

    W. M. Dawson & A. J. Moulson

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  1. W. M. Dawson
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  2. A. J. Moulson
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Dawson, W.M., Moulson, A.J. The combined effects of Fe and H2 on the kinetics of silicon nitridation. J Mater Sci 13, 2289–2290 (1978). https://doi.org/10.1007/BF00541693

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  • DOI: https://doi.org/10.1007/BF00541693

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