Journal of Materials Science

, Volume 12, Issue 7, pp 1285–1306 | Cite as

The fundamentals of chemical vapour deposition

  • W. A. Bryant
Review

Abstract

Fundamentals of the chemical vapour deposition process are described and examples given of its application. The most important aspects of the process are reviewed; these include deposit structure (with its relation to process parameters), process control through application of the principles of thermodynamics and reaction kinetics (with emphasis on deposit thickness uniformity, deposit composition control and deposit-substrate adherence) and basic design features of the equipment used.

Keywords

Polymer Chemical Vapour Deposition Process Control Vapour Deposition Chemical Vapour 

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Copyright information

© Chapman and Hall Ltd. 1977

Authors and Affiliations

  • W. A. Bryant
    • 1
  1. 1.Westinghouse Research and Development CenterPittsburghUSA

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