Abstract
High-purity silicon powder compacts have been nitrided in nitrogen atmospheres containing varying partial pressures of hydrogen. The accelerated nitridation rates observed are interpreted in terms of the interaction of the hydrogen with the natural oxide film on the surface of the silicon particles. A model is presented for reactions taking place during the nitridation of these compacts in the presence of furnace atmospheres contaminated by low partial pressures of water vapour.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
A. J. Moulson, J. Mater. Sci. 14 (1979) 1017.
H. Dervišbegović and F. L. Riley, ibid. 14 (1979) 1265.
S. M. Boyer and A. J. Moulson, ibid. 13 (1978) 1637.
D. Campos-Loriz, S. P. Howlett, F. L. Riley and F. Yusaf, ibid. 14 (1979) 2325.
A. Atkinson and A. J. Moulson, Sci. Ceram. 8 (1976) 111.
A. Atkinson, A. J. Moulson and E. W. Roberts, J. Amer. Ceram. Soc. 59 (1976) 285.
W. M. Dawson and A. J. Moulson, J. Mater. Sci. 13 (1978) 2289.
D. Campos-Loriz and F. L. Riley, ibid. 14 (1979) 1007.
P. Popper and S. N. Ruddlesden, Trans. Brit. Ceram. Soc. 61 (1960) 603.
N. L. Parr, R. Sands, P. L. Pratt, E. R. W. May, C. R. Shakespeare and D. S. Thompson, Powder Met. 8 (1961) 152.
J. A. Mangels, J. Amer. Ceram. Soc. 58 (1975) 354.
B. F. Jones and M. W. Lindley, J. Mater. Sci. 11 (1976) 1969.
M. W. Lindley, D. P. Elias, B. F. Jones and K. C. Pitman, ibid. 14 (1979) 70.
J. Heinrich, DFVLR Report, DFVLR-FB 79-32 (Institut für Werkstoff-Forschung, Köln, September, 1979).
G. S. Hughes, C. McGreavy and J. H. Merkin, J. Mater. Sci. 15 (1980) 2345.
A. Atkinson, P. J. Leatt and A. J. Moulson, Proc. Brit. Ceram. Soc. 22 (1973) 253.
J. E. Still and H. J. Cluley, Analyst 97 (1972) 1.
A. Atkinson and A. J. Moulson, SRC Research Grant B/SR/7943 Progress Report No. 4 (October 1972–September 1973).
M. Mitomo, J. Amer. Ceram. Soc. 58 (1975) 523.
Idem, ibid. 12 (1977) 233.
A. Giachello and P. Popper, in “Science of Ceramics” Vol. 10, edited by H. Hausner (Deutsche-Keramische Gesellschaft, Weiden, 1980) p. 377.
D. R. Messier and P. Wong, J. Amer. Ceram. Soc. 56 (1973) 480.
P. E. D. Morgan, J. Mater. Sci. 14 (1980) 791.
S. J. Raider, R. A. Goula and J. R. Petrak, Appl. Phys. Lett. 27 (1975) 150.
E. Kooi, J. G. Vanlierop and J. A. Appels, J. Electrochem. Soc. 123 (1976) 1117.
M. N. A. Rahaman and A. J. Moulson, J. Mater. Sci. 16 (1981) to be published.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Dervišbegović, H., Riley, F.L. The role of hydrogen in the nitridation of silicon powder compacts. J Mater Sci 16, 1945–1955 (1981). https://doi.org/10.1007/BF00540643
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF00540643